Japan, Jan. 23 -- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC has got intellectual property rights for 'APPARATUS AND METHOD FOR CONTROLLING PRECURSOR FLOW.' Other related details are as follows:
Application Number: JP,2023-100063
Category (FI): B01J4/00,102,H10P14/60,101@F,H01L21/31@F,C23C16/448
Stage: Grant (IP right document published.)
Filing Date: June 19, 2023
Publication Date: Sept. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
