Japan, Nov. 10 -- SUMITOMO CHEMICAL CO LTD has got intellectual property rights for 'CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION, AND METHOD FOR PRODUCING RESIST PATTERN.' Other related details are as follows:
Application Number: JP,2021-081318
Category (FI): G03F7/20,501,G03F7/20,521,C07C62/24,G03F7/039,601,C08F20/18,C08F12/22,G03F7/038,601,G03F7/004,503@A,C07D321/06,C07C69/736,C07C65/10,G03F7/004,501
Stage: Grant (IP right document published.)
Filing Date: May 12, 2021
Publication Date: Dec. 2, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
