Japan Intellectual Property Rights: CLEANING DEVICE AND MONITORING METHOD THEREOF

Japan, June 10 -- DISCO CORP has got intellectual property rights for 'CLEANING DEVICE AND MONITORING METHOD THEREOF.' Other related details are as follows:

Application Number: JP,2022-075465

Category (FI): H10P70/00,103@A,H10P70/00,108@G,H01L21/304,648@G,H01L21/304,643@A

Stage: Grant (IP right document published.)

Filing Date: April 28, 2022

Publication Date: Nov. 10, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.