Japan Intellectual Property Rights: COATING FILM FORMATION METHOD, COATING FILM FORMATION DEVICE, AND PROGRAM

Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'COATING FILM FORMATION METHOD, COATING FILM FORMATION DEVICE, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2022-002530

Category (FI): B05C11/08,B05C11/10,B05C9/14,B05D1/40@A,B05D3/00@D,B05D3/00@F,B05D3/02@D,B05D3/04@Z,H01L21/30,564@C,H01L21/30,564@D,H10P76/00,564@C,H10P76/00,564@D,H10P76/20

Stage: Grant (IP right document published.)

Filing Date: Jan. 11, 2022

Publication Date: July 24, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.