Japan Intellectual Property Rights: COMPOSITE STRUCTURE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING COMPOSITE STRUCTURE

Japan, April 1 -- TOTO LTD has got intellectual property rights for 'COMPOSITE STRUCTURE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING COMPOSITE STRUCTURE.' Other related details are as follows:

Application Number: JP,2022-017676

Category (FI): C23C24/04,H10P14/60,101@C,H01L21/302,101@G,H01L21/31@C,H01L21/205,C04B35/44,C23C24/10@C,H10P50/20,101@G,H10P14/24

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 8, 2022

Publication Date: Oct. 12, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.