Japan, Nov. 6 -- ULVAC JAPAN LTD has got intellectual property rights for 'CONTROL DEVICE, FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-067084
Category (FI): C23C14/35@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 14, 2022
Publication Date: Oct. 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
