Japan Intellectual Property Rights: CONVEYANCE DEVICE, CONVEYANCE METHOD, LITHOGRAPHY DEVICE, LITHOGRAPHY SYSTEM, AND ARTICLE MANUFACTURING METHOD

Japan, Nov. 10 -- CANON INC has got intellectual property rights for 'CONVEYANCE DEVICE, CONVEYANCE METHOD, LITHOGRAPHY DEVICE, LITHOGRAPHY SYSTEM, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:

Application Number: JP,2024-150522

Category (FI): B25J15/06@G,G03F7/20,521,H01L21/30,502@D,H01L21/68@B,H01L21/68@G,H01L21/68@N,H10P72/30@B,H10P72/50@G,H10P72/70,H10P76/00,600

Stage: Grant (IP right document published.)

Filing Date: Sept. 2, 2024

Publication Date: Dec. 3, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.