Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DATA COLLECTION SYSTEM, DATA COLLECTION DEVICE, DATA COLLECTION METHOD, AND DATA COLLECTION PROGRAM.' Other related details are as follows:
Application Number: JP,2024-186757
Category (FI): H01L21/02@Z,H10P95/00,102@B,H10P95/00,102@E,H10P95/00,102@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 23, 2024
Publication Date: Jan. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.