Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION JUDGEMENT METHOD AND SUBSTRATE TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2023-012891
Category (FI): C23C16/50,C23C16/52,G03B15/00@T,H04N23/40,300,H04N23/60,500
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 31, 2023
Publication Date: Aug. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
