Japan Intellectual Property Rights: DEPOSITION METHOD AND DEPOSITION APPARATUS

Japan, March 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION APPARATUS.' Other related details are as follows:

Application Number: JP,2022-015860

Category (FI): C23C16/02,C23C16/26,H01L21/314@A,H01L21/31@B,H10P14/60,101@B,H10P14/69@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 3, 2022

Publication Date: Aug. 16, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.