Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2022-203636
Category (FI): H10P14/692@X,H10P14/60,101@B,C23C16/455,H01L21/318@B,H01L21/31@B,H01L21/316@X,H10P14/694@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 20, 2022
Publication Date: July 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
