Japan, Aug. 31 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2023-057374
Category (FI): H10P14/60,101@C,C23C14/12,H01L21/312@A,H01L21/31@C,H10P14/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 31, 2023
Publication Date: Oct. 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
