Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-065844
Category (FI): H01L21/31@C,H01L21/318@B,C23C16/38
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 12, 2022
Publication Date: Oct. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
