Japan, Jan. 16 -- GLOBALWAFERS JAPAN CO LTD has got intellectual property rights for 'DETECTION METHOD FOR CRYSTAL DEFECT OF SILICON WAFER SURFACE.' Other related details are as follows:
Application Number: JP,2021-204960
Category (FI): C30B15/00@Z,C30B29/06,502@Z,H01L21/66@L,H10P74/20@L
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 17, 2021
Publication Date: June 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
