Japan, Nov. 4 -- CANON INC has got intellectual property rights for 'DETERMINATION DEVICE, PATTERN FORMATION DEVICE, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-146177
Category (FI): G03F7/20,521,H01L21/30,502@D,H01L21/68@N,H10P72/70,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 14, 2022
Publication Date: March 27, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
