Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEVICE FOR PROCESSING SUBSTRATES AND METHOD FOR PROCESSING SUBSTRATES.' Other related details are as follows:
Application Number: JP,2024-205675
Category (FI): H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 26, 2024
Publication Date: Feb. 6
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
