Japan, April 6 -- TSUKUBA SEIKO CO LTD has got intellectual property rights for 'ELECTROSTATIC ADSORPTION TOOL AND OBJECT SURFACE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-001771
Category (FI): H10P72/72,H01L21/68@R,H01L21/306@K,H10P50/60@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 7, 2022
Publication Date: July 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
