Japan, Jan. 16 -- TOTO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2024-103812
Category (FI): H01L21/302,101@G,H01L21/302,101@R,H01L21/68@R,H02N13/00@D,H10P50/20,101@G,H10P50/20,101@R,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: June 27, 2024
Publication Date: Sept. 18, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
