Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'EMBEDDING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-054037
Category (FI): C23C16/40,C23C16/42,H01L21/316@X,H01L21/318@B,H01L21/31@E,H10P14/60,101@E,H10P14/692@X,H10P14/694@B
Stage: Grant (IP right document published.)
Filing Date: March 29, 2022
Publication Date: Oct. 12, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
