Japan, Jan. 16 -- CYMER LLC has got intellectual property rights for 'ENERGY CORRECTION MODULE FOR OPTICAL SOURCE APPARATUS.' Other related details are as follows:
Application Number: JP,2023-216496
Category (FI): G03F7/20,502,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 22, 2023
Publication Date: March 27, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
