Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-209422
Category (FI): H01L21/302,101@B,H01L21/302,101@D,H01L21/302,105@A,H01L21/302,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 27, 2022
Publication Date: July 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
