Japan, Jan. 20 -- CANON INC has got intellectual property rights for 'EXPOSURE APPARATUS, CONTROL METHOD OF THE SAME, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2021-199456
Category (FI): G03F7/20,501,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 8, 2021
Publication Date: June 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
