Japan, Aug. 18 -- GIGAPHOTON INC has got intellectual property rights for 'EXTREME-ULTRAVIOLET LIGHT GENERATOR AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE.' Other related details are as follows:
Application Number: JP,2022-166045
Category (FI): G03F7/20,503,H05G2/00@K,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 17, 2022
Publication Date: April 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
