Japan, June 10 -- KLA CORP has got intellectual property rights for 'EXTREME ULTRAVIOLET MASK INSPECTION SYSTEMS.' Other related details are as follows:
Application Number: JP,2025-024474
Category (FI): G03F1/84
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 18, 2025
Publication Date: May 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
