Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2021-211030
Category (FI): C23C14/00@B,C23C14/12
Stage: Grant (IP right document published.)
Filing Date: Dec. 24, 2021
Publication Date: July 6, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
