Japan, March 3 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2021-147866
Category (FI): C23C14/06@A,C23C14/34@V,H01L21/203@S,H10P14/22
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 10, 2021
Publication Date: April 8, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
