Japan Intellectual Property Rights: FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS.' Other related details are as follows:

Application Number: JP,2022-023572

Category (FI): C23C16/26,H01L21/205,H10P14/69@A,H10P50/20,105@A,H10P14/24,H01L21/302,105@A,H01L21/314@A,C23C16/50,C23C16/56

Stage: Grant (IP right document published.)

Filing Date: Feb. 18, 2022

Publication Date: Aug. 30, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.