Japan Intellectual Property Rights: FILM FORMATION DEVICE, FILM FORMATION METHOD, ALIGNMENT DEVICE, AND ALIGNMENT METHOD

Japan, Oct. 5 -- CANON TOKKI CORP has got intellectual property rights for 'FILM FORMATION DEVICE, FILM FORMATION METHOD, ALIGNMENT DEVICE, AND ALIGNMENT METHOD.' Other related details are as follows:

Application Number: JP,2022-091440

Category (FI): C23C14/04@A,H05B33/10,H05B33/14@A,H10K50/10,H10K59/00,H10K59/10,H10K59/65,H10K71/00,H10K71/10,H10K71/16,H10K71/16,164,H10K71/16,166,H10K71/70

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 6, 2022

Publication Date: Dec. 18, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.