Japan, April 9 -- CANON INC has got intellectual property rights for 'FILM FORMATION METHOD, FILM FORMATION DEVICE AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2022-093095
Category (FI): C08J5/18,H01L21/30,502@D,H01L21/30,578,H10P76/00,578,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 8, 2022
Publication Date: Dec. 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
