Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM-FORMING METHOD AND FILM-FORMING DEVICE.' Other related details are as follows:
Application Number: JP,2022-110733
Category (FI): H01L21/318@B,C23C16/42,H10P14/694@B,H10P14/60,101@B,H01L21/31@B
Stage: Grant (IP right document published.)
Filing Date: July 8, 2022
Publication Date: Jan. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
