Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM FORMING METHOD.' Other related details are as follows:
Application Number: JP,2025-049865
Category (FI): H10P50/28,H01L21/302,201@A,C23C16/455,H10P14/694@B,H10P50/20,201@A,C23C16/42,H01L21/318@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 25, 2025
Publication Date: July 1, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
