Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FOREIGN MATTER DETECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, FOREIGN MATTER DETECTION METHOD AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2024-016335
Category (FI): G01N21/49@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 6, 2024
Publication Date: March 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
