Japan, Jan. 16 -- ASM IP HOLDING BV has got intellectual property rights for 'GAS SUPPLY UNIT AND BASE MATERIAL PROCESSING APPARATUS INCLUDING GAS SUPPLY UNIT.' Other related details are as follows:
Application Number: JP,2021-163426
Category (FI): C23C16/455,H01L21/31@C,H10P14/60,101@C
Stage: Grant (IP right document published.)
Filing Date: Oct. 4, 2021
Publication Date: April 19, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
