Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEAT TREATMENT DEVICE, HEAT TREATMENT METHOD, AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2022-090446
Category (FI): H01L21/30,566,H10P76/00,566
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 2, 2022
Publication Date: Dec. 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
