Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEAT TREATMENT DEVICE.' Other related details are as follows:
Application Number: JP,2022-113823
Category (FI): H01L21/30,567,H01L21/68@N,H10P72/70,H10P76/00,567
Stage: Grant (IP right document published.)
Filing Date: July 15, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
