Japan, Jan. 21 -- NGK INSULATORS LTD has got intellectual property rights for 'HEATER FOR SEMICONDUCTOR MANUFACTURING DEVICE.' Other related details are as follows:
Application Number: JP,2024-204673
Category (FI): H10P72/70,H05B3/28,H05B3/20,356,H05B3/18,H05B3/10@C,H01L21/68@N,C04B35/582
Stage: Grant (IP right document published.)
Filing Date: Nov. 25, 2024
Publication Date: Oct. 23, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
