Japan, Nov. 6 -- HPSP CO LTD has got intellectual property rights for 'HIGH PRESSURE SUBSTRATE PROCESSING APPARATUS AND COLD TRAP USED THEREFOR.' Other related details are as follows:
Application Number: JP,2025-010413
Category (FI): H10P14/60,101@E,H01L21/324@R,H01L21/31@E,H10P95/90,101@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 24, 2025
Publication Date: Aug. 5, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
