Japan, June 10 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'IN SITU REAL-TIME SENSING AND COMPENSATION OF NONUNIFORMITY IN SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2024-202846
Category (FI): H05H1/46@R,H10P50/20,101@C,H01L21/302,101@C,H05H1/46@L
Stage: Grant (IP right document published.)
Filing Date: Nov. 21, 2024
Publication Date: Feb. 6, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
