Japan, Jan. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION DEVICE AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2021-213140
Category (FI): H10P74/00@B,H10P72/50@G,G01R31/28@H,H01L21/66@B,H01L21/68@G
Stage: Grant (IP right document published.)
Filing Date: Dec. 27, 2021
Publication Date: July 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
