Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'INSPECTION SYSTEM AND METHOD FOR CONTROLLING TEMPERATURE.' Other related details are as follows:
Application Number: JP,2023-004559
Category (FI): G01R31/26@G,G01R31/27,H10P74/00@B,H01L21/66@B,G01R31/28@H
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 16, 2023
Publication Date: July 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
