Japan, July 27 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'INTERFEROMETRIC MEASUREMENT METHOD AND INTERFEROMETRIC MEASUREMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2022-033912
Category (FI): G01B9/02015,G01B11/24@D,G01B9/02002
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 4, 2022
Publication Date: Oct. 7, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
