Japan, June 10 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'LAYERED AEROSOL DEPOSITED COATING FOR ALUMINUM COMPONENT FOR PLASMA PROCESSING CHAMBER.' Other related details are as follows:
Application Number: JP,2024-206951
Category (FI): H10P50/20,101@G,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 28, 2024
Publication Date: Feb. 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
