Japan, Feb. 27 -- SINFONIA TECHNOLOGY CO LTD has got intellectual property rights for 'LOAD PORT AND OPENING/CLOSING METHOD.' Other related details are as follows:
Application Number: JP,2022-101087
Category (FI): H01L21/68@T,H01L21/68@A,H10P72/30@A,H10P72/10@T
Stage: PROBLEM TO BE SOLVED: To provide a technique that can avoid unreasonable force causing deformation from acting on a door portion.SOLUTION: A load port 1 to be connected to a transport portion 8 includes a plate-shaped base portion 10 constituting a part of a wall portion of the transport portion 8, a mounting portion 20 on which a storage container 9 is mounted, a mounting portion drive mechanism 30 that moves the mounting portion 20 in a direction toward or away from the base portion 10, a door portion 40 that can open and close an opening portion 13 provided in the base portion 10, a door portion drive mechanism 50 that moves the door portion 40 between an opening position and a closing position, and a movement restricting portion 60 for restricting the movement of the mounting portion 20 in a direction away from the base portion 10 by abutting against the mounting portion 20 when the door portion 40 is pressed toward the opening portion 13 and a lid portion 92 held by the door portion 40 is attached to a container main body 91.SELECTED DRAWING: Figure 13 (Grant)
Filing Date: June 23, 2022
Publication Date: Jan. 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
