Japan, July 14 -- SHINKAWA LTD has got intellectual property rights for 'MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2023-062379
Category (FI): G01B11/24@K,G01B11/00@H,H01L21/52@F,H10W72/30@F
Stage: PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a semiconductor device that can detect an abnormality in a collet with a simple configuration.SOLUTION: A manufacturing apparatus 10 of a semiconductor device includes: a collet 30 having a suction hole 20 formed along a central axis and configured to suction-hold a semiconductor chip 100 on a holding surface 38 which is an end surface; an inspection camera 50 that images the collet 30 from below when it is not holding the semiconductor chip 100 to obtain a collet inspection image; and a controller 52 that calculates an evaluation index that indicates the degree of abnormality of the collet 30 on the basis of the collet inspection image, and determines whether there is an abnormality in the collet 30 on the basis of the evaluation index, or presents the evaluation index to an operator.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: April 6, 2023
Publication Date: Oct. 18, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
