Japan, Nov. 4 -- NGK SPARK PLUG CO LTD has got intellectual property rights for 'MANUFACTURING METHOD FOR ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2023-046914
Category (FI): H01L21/68@R,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 23, 2023
Publication Date: Oct. 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
