Japan Intellectual Property Rights: MANUFACTURING SYSTEM OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Japan, June 10 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'MANUFACTURING SYSTEM OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE.' Other related details are as follows:

Application Number: JP,2024-198200

Category (FI): H01L21/68@N,H01L21/302,101@G,H01L21/02@Z,H10P95/90,102,H10P72/70,H10P50/20,101@G

Stage: Grant (IP right document published.)

Filing Date: Nov. 13, 2024

Publication Date: Feb. 12, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.