Japan, Jan. 19 -- TOKYO ELECTRON LTD has got intellectual property rights for 'METHOD AND APPARATUS FOR EMBEDDING RUTHENIUM IN RECESS.' Other related details are as follows:
Application Number: JP,2022-020708
Category (FI): C23C16/06,H01L21/28,301@R,H01L21/285@C,H01L21/88@B,H01L21/88@M,H10D64/60,H10P14/43,H10W20/00@B,H10W20/44@M,H10W20/44@X
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 14, 2022
Publication Date: Aug. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
