Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'METHOD AND APPARATUS FOR FILLING RUTHENIUM IN RECESS.' Other related details are as follows:
Application Number: JP,2025-278891
Category (FI): H10W20/44@M,H10W20/00@B,H10D64/60,H10P14/43,C23C16/06,C23C16/04
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 23, 2025
Publication Date: March 9
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
