Japan, Jan. 16 -- AGC INC has got intellectual property rights for 'METHOD FOR MEASURING SURFACE SHAPE, METHOD FOR INSPECTING SUBSTRATE FOR MASK BLANK, METHOD FOR MANUFACTURING MASK BLANK.' Other related details are as follows:
Application Number: JP,2022-068438
Category (FI): G03F1/84
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 18, 2022
Publication Date: Oct. 30, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
