Japan, June 10 -- INDUSTRY-ACADEMIC COOPERATION FOUNDATION YEUNGNAM UNIV,TANAKA KIKINZOKU KOGYO KK has got intellectual property rights for 'METHOD FOR PRODUCING RUTHENIUM THIN FILM OR RUTHENIUM COMPOUND THIN FILM BY CHEMICAL VAPOR DEPOSITION PROCESS, AND RUTHENIUM THIN FILM OR RUTHENIUM COMPOUND THIN FILM.' Other related details are as follows:
Application Number: JP,2022-091312
Category (FI): H10P14/43,C23C16/18,H01L21/285@C
Stage: Grant (IP right document published.)
Filing Date: June 6, 2022
Publication Date: Dec. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
